Performance characteristics of a new generation pressure microsensor for physiologic applications

Patrick S. Cottler; Whitney R. Karpen; Duane A. Morrow; Kenton R. Kaufman

doi:10.1007/s10439-009-9718-x

Performance characteristics of a new generation pressure microsensor for physiologic applications

Patrick S. Cottler, Whitney R. Karpen, Duane A. Morrow, Kenton R. Kaufman

Orthopedic Surgery

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15 Scopus citations

Abstract

A next generation fiber-optic microsensor based on the extrinsic Fabry-Perot interferometric (EFPI) technique has been developed for pressure measurements. The basic physics governing the operation of these sensors makes them relatively tolerant or immune to the effects of high-temperature, high-EMI, and highly-corrosive environments. This pressure microsensor represents a significant improvement in size and performance over previous generation sensors. To achieve the desired overall size and sensitivity, numerical modeling of diaphragm deflection was incorporated in the design, with the desired dimensions and calculated material properties. With an outer diameter of approximately 250 μm, a dynamic operating range of over 250 mmHg, and a sampling frequency of 960 Hz, this sensor is ideal for the minimally invasive measurement of physiologic pressures and incorporation in catheter-based instrumentation. Nine individual sensors were calibrated and characterized by comparing the output to a U.S. National Institute of Standards and Technology (NIST) Traceable reference pressure over the range of 0-250 mmHg. The microsensor performance demonstrated accuracy of better than 2% full-scale output, and repeatability, and hysteresis of better than 1% full-scale output. Additionally, fatigue effects on five additional sensors were 0.25% full-scale output after over 10,000 pressure cycles.

Original language	English (US)
Pages (from-to)	1638-1645
Number of pages	8
Journal	Annals of Biomedical Engineering
Volume	37
Issue number	8
DOIs	https://doi.org/10.1007/s10439-009-9718-x
State	Published - Aug 2009

Keywords

Extrinsic Fabry-Perot interferometric (EFPI)
Fiber-optic sensor
Pressure

ASJC Scopus subject areas

Biomedical Engineering

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10.1007/s10439-009-9718-x

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@article{323a8954ee684171bc67941aceb6647d,

title = "Performance characteristics of a new generation pressure microsensor for physiologic applications",

abstract = "A next generation fiber-optic microsensor based on the extrinsic Fabry-Perot interferometric (EFPI) technique has been developed for pressure measurements. The basic physics governing the operation of these sensors makes them relatively tolerant or immune to the effects of high-temperature, high-EMI, and highly-corrosive environments. This pressure microsensor represents a significant improvement in size and performance over previous generation sensors. To achieve the desired overall size and sensitivity, numerical modeling of diaphragm deflection was incorporated in the design, with the desired dimensions and calculated material properties. With an outer diameter of approximately 250 μm, a dynamic operating range of over 250 mmHg, and a sampling frequency of 960 Hz, this sensor is ideal for the minimally invasive measurement of physiologic pressures and incorporation in catheter-based instrumentation. Nine individual sensors were calibrated and characterized by comparing the output to a U.S. National Institute of Standards and Technology (NIST) Traceable reference pressure over the range of 0-250 mmHg. The microsensor performance demonstrated accuracy of better than 2% full-scale output, and repeatability, and hysteresis of better than 1% full-scale output. Additionally, fatigue effects on five additional sensors were 0.25% full-scale output after over 10,000 pressure cycles.",

keywords = "Extrinsic Fabry-Perot interferometric (EFPI), Fiber-optic sensor, Pressure",

author = "Cottler, {Patrick S.} and Karpen, {Whitney R.} and Morrow, {Duane A.} and Kaufman, {Kenton R.}",

note = "Funding Information: The authors would like to acknowledge Dan Blevins for technical assistance in sensor fabrication and David Dausch from RTI International for assistance with the diaphragm design and photoetching processes. This work was supported by the National Center for Medical Rehabilitation Research (NCMRR) within the National Institute of Child Health and Human Development (NICHD) RO1 HD31476, {\textquoteleft}{\textquoteleft}Microsensor for Intramuscular Pressure Measurement,{\textquoteright}{\textquoteright} as well as the National Eye Institute (NEI) 5R44EY013902-03 {\textquoteleft}{\textquoteleft}Miniature Non-Invasive IOP Measurement Device.{\textquoteright}{\textquoteright} Its contents are solely the responsibility of the authors and do not necessarily represent the official views of the NCMRR, NEI, or NIH.",

year = "2009",

month = aug,

doi = "10.1007/s10439-009-9718-x",

language = "English (US)",

volume = "37",

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T1 - Performance characteristics of a new generation pressure microsensor for physiologic applications

AU - Cottler, Patrick S.

AU - Karpen, Whitney R.

AU - Morrow, Duane A.

AU - Kaufman, Kenton R.

N1 - Funding Information: The authors would like to acknowledge Dan Blevins for technical assistance in sensor fabrication and David Dausch from RTI International for assistance with the diaphragm design and photoetching processes. This work was supported by the National Center for Medical Rehabilitation Research (NCMRR) within the National Institute of Child Health and Human Development (NICHD) RO1 HD31476, ‘‘Microsensor for Intramuscular Pressure Measurement,’’ as well as the National Eye Institute (NEI) 5R44EY013902-03 ‘‘Miniature Non-Invasive IOP Measurement Device.’’ Its contents are solely the responsibility of the authors and do not necessarily represent the official views of the NCMRR, NEI, or NIH.

PY - 2009/8

Y1 - 2009/8

N2 - A next generation fiber-optic microsensor based on the extrinsic Fabry-Perot interferometric (EFPI) technique has been developed for pressure measurements. The basic physics governing the operation of these sensors makes them relatively tolerant or immune to the effects of high-temperature, high-EMI, and highly-corrosive environments. This pressure microsensor represents a significant improvement in size and performance over previous generation sensors. To achieve the desired overall size and sensitivity, numerical modeling of diaphragm deflection was incorporated in the design, with the desired dimensions and calculated material properties. With an outer diameter of approximately 250 μm, a dynamic operating range of over 250 mmHg, and a sampling frequency of 960 Hz, this sensor is ideal for the minimally invasive measurement of physiologic pressures and incorporation in catheter-based instrumentation. Nine individual sensors were calibrated and characterized by comparing the output to a U.S. National Institute of Standards and Technology (NIST) Traceable reference pressure over the range of 0-250 mmHg. The microsensor performance demonstrated accuracy of better than 2% full-scale output, and repeatability, and hysteresis of better than 1% full-scale output. Additionally, fatigue effects on five additional sensors were 0.25% full-scale output after over 10,000 pressure cycles.

AB - A next generation fiber-optic microsensor based on the extrinsic Fabry-Perot interferometric (EFPI) technique has been developed for pressure measurements. The basic physics governing the operation of these sensors makes them relatively tolerant or immune to the effects of high-temperature, high-EMI, and highly-corrosive environments. This pressure microsensor represents a significant improvement in size and performance over previous generation sensors. To achieve the desired overall size and sensitivity, numerical modeling of diaphragm deflection was incorporated in the design, with the desired dimensions and calculated material properties. With an outer diameter of approximately 250 μm, a dynamic operating range of over 250 mmHg, and a sampling frequency of 960 Hz, this sensor is ideal for the minimally invasive measurement of physiologic pressures and incorporation in catheter-based instrumentation. Nine individual sensors were calibrated and characterized by comparing the output to a U.S. National Institute of Standards and Technology (NIST) Traceable reference pressure over the range of 0-250 mmHg. The microsensor performance demonstrated accuracy of better than 2% full-scale output, and repeatability, and hysteresis of better than 1% full-scale output. Additionally, fatigue effects on five additional sensors were 0.25% full-scale output after over 10,000 pressure cycles.

KW - Extrinsic Fabry-Perot interferometric (EFPI)

KW - Fiber-optic sensor

KW - Pressure

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JF - Annals of Biomedical Engineering

SN - 0090-6964

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Performance characteristics of a new generation pressure microsensor for physiologic applications

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