Individually-addressable parylene microneedle arrays with integrated microchannels for retinal prosthesis study

H. Tu, Y. Li, P. Finlayson, R. Iezzi, Y. Xu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Retinal prostheses promise to provide artificial vision to the blind. Retinal implant based on electrical stimulation has limitations such as electrode corrosion, water hydrolysis, and generation of toxic radicals due to the large stimulation current. The more naturalistic chemical stimulation is able to effectively address these limitations of electrical stimulation. This paper reports the development of out-of-plane parylene microneedle arrays that can be individually addressed by integrated microchannels. The individually-addressable microneedle arrays were fabricated using silicon molds formed by DRIE, isotropic silicon etching of XeF2, and the conformal coating of parylene. Both rigid and flexible devices were developed. These devices enable the delivery of chemicals with controlled temporal and spatial patterns and allow us to study neurotransmitter-based retinal prostheses.

Original languageEnglish (US)
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages1224-1227
Number of pages4
DOIs
StatePublished - Sep 1 2011
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: Jun 5 2011Jun 9 2011

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period6/5/116/9/11

Keywords

  • Individually-addressable
  • Parylene Microneedle

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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    Tu, H., Li, Y., Finlayson, P., Iezzi, R., & Xu, Y. (2011). Individually-addressable parylene microneedle arrays with integrated microchannels for retinal prosthesis study. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1224-1227). [5969399] (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969399