Stereomask lithography for multi-object bio-patterning

Siwei Zhao, Arnold Chen, Alexander Revzin, Tingrui Pan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The advent of biological micro-patterning techniques has given new impetus to many areas of biological research, including quantitative biochemical analysis, biosensing, and regenerative medicine. Conventional micropatterning techniques (e.g. photolithography and soft lithography) although have seen encouraging adaptation to biological applications, still have not completely addressed the needs of constructing multi-object biological microarrays with single cell resolution without requiring cleanroom access. In this abstract, we present a novel versatile biological lithography technique to achieve integrated multi-object patterning with high resolution and high adaptability to various biomaterials, referred to as the Stereomask Lithography (SML). It is based on serial placement of multiple biological objects using a novel three dimensional shadow mask with protection for previously patterned materials and a peg-in-hole interlayer alignment scheme.

Original languageEnglish (US)
Title of host publication2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages336-339
Number of pages4
DOIs
StatePublished - Apr 13 2011
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: Jan 23 2011Jan 27 2011

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
CountryMexico
CityCancun
Period1/23/111/27/11

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Zhao, S., Chen, A., Revzin, A., & Pan, T. (2011). Stereomask lithography for multi-object bio-patterning. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 336-339). [5734430] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2011.5734430