A seven-layer process was developed to fabricate monolithic high-speed logic circuits, requiring integration of Schottky diodes and resistors with interband resonant tunneling diodes (RTDs). With this process technology, we have demonstrated a functionally complete logic family based on RTDs with a maximum operating frequency in excess of 12 GHz and a minimum power dissipation on the order of 0.5 mW per gate.
|Original language||English (US)|
|Number of pages||5|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|State||Published - Jan 1 1996|
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering