TY - GEN
T1 - Printing mems
T2 - 2008 Solid-State Sensors, Actuators, and Microsystems Workshop
AU - Wang, W.
AU - Cong, H.
AU - Qiu, Z.
AU - Zhao, S.
AU - Zhu, H.
AU - Revzin, A.
AU - Pan, T.
N1 - Funding Information:
This research is partially supported by California Healthcare Foundation and the University of California, Davis. The authors would like to thank Dupont Corporation for the kindly supply of polyimide films.
Publisher Copyright:
© 2008 TRF.
PY - 2008
Y1 - 2008
N2 - With the major advances in soft lithography and polymeric materials, use of microfluidic lab-on-a-chip device has attracted tremendous attention recently. A simple and fast micromachining process is highly in demand to prototype such a device. In this paper, we first reported an out-of-cleanroom printing-based integrated microfabrication process, referred to as printing microelectromechanical system (Printing MEMS). Using the Printing MEMS process, we demonstrated the potential to accomplish an entire design-to-fabrication cycle within an hour, including 50 μm-resolution non-lithographic patterning, well-controlled polyimide etching, three-dimensional pattern alignment and multilayer wax fusion bonding. A microfluidic mixer was prepared by this method and tested for the process validation.
AB - With the major advances in soft lithography and polymeric materials, use of microfluidic lab-on-a-chip device has attracted tremendous attention recently. A simple and fast micromachining process is highly in demand to prototype such a device. In this paper, we first reported an out-of-cleanroom printing-based integrated microfabrication process, referred to as printing microelectromechanical system (Printing MEMS). Using the Printing MEMS process, we demonstrated the potential to accomplish an entire design-to-fabrication cycle within an hour, including 50 μm-resolution non-lithographic patterning, well-controlled polyimide etching, three-dimensional pattern alignment and multilayer wax fusion bonding. A microfluidic mixer was prepared by this method and tested for the process validation.
UR - http://www.scopus.com/inward/record.url?scp=85061907211&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85061907211&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85061907211
T3 - Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop
SP - 236
EP - 239
BT - 2008 Solid-State Sensors, Actuators, and Microsystems Workshop
A2 - Spangler, Leland
A2 - Turner, Kimberly L.
PB - Transducer Research Foundation
Y2 - 1 June 2008 through 5 June 2008
ER -