Printing mems: From a single flexible polyimide film to three-dimensional integrated microfluidics

W. Wang, H. Cong, Z. Qiu, S. Zhao, H. Zhu, Alexander Revzin, T. Pan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

With the major advances in soft lithography and polymeric materials, use of microfluidic lab-on-a-chip device has attracted tremendous attention recently. A simple and fast micromachining process is highly in demand to prototype such a device. In this paper, we first reported an out-of-cleanroom printing-based integrated microfabrication process, referred to as printing microelectromechanical system (Printing MEMS). Using the Printing MEMS process, we demonstrated the potential to accomplish an entire design-to-fabrication cycle within an hour, including 50 μm-resolution non-lithographic patterning, well-controlled polyimide etching, three-dimensional pattern alignment and multilayer wax fusion bonding. A microfluidic mixer was prepared by this method and tested for the process validation.

Original languageEnglish (US)
Title of host publication2008 Solid-State Sensors, Actuators, and Microsystems Workshop
EditorsLeland Spangler, Kimberly L. Turner
PublisherTransducer Research Foundation
Pages236-239
Number of pages4
ISBN (Electronic)0964002477, 9780964002470
StatePublished - Jan 1 2008
Externally publishedYes
Event2008 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States
Duration: Jun 1 2008Jun 5 2008

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference2008 Solid-State Sensors, Actuators, and Microsystems Workshop
CountryUnited States
CityHilton Head Island
Period6/1/086/5/08

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ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Hardware and Architecture

Cite this

Wang, W., Cong, H., Qiu, Z., Zhao, S., Zhu, H., Revzin, A., & Pan, T. (2008). Printing mems: From a single flexible polyimide film to three-dimensional integrated microfluidics. In L. Spangler, & K. L. Turner (Eds.), 2008 Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 236-239). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). Transducer Research Foundation.