@inproceedings{18ea74c88da043d6b7a4ab05ac841c9e,
title = "Printing mems: From a single flexible polyimide film to three-dimensional integrated microfluidics",
abstract = "With the major advances in soft lithography and polymeric materials, use of microfluidic lab-on-a-chip device has attracted tremendous attention recently. A simple and fast micromachining process is highly in demand to prototype such a device. In this paper, we first reported an out-of-cleanroom printing-based integrated microfabrication process, referred to as printing microelectromechanical system (Printing MEMS). Using the Printing MEMS process, we demonstrated the potential to accomplish an entire design-to-fabrication cycle within an hour, including 50 μm-resolution non-lithographic patterning, well-controlled polyimide etching, three-dimensional pattern alignment and multilayer wax fusion bonding. A microfluidic mixer was prepared by this method and tested for the process validation.",
author = "W. Wang and H. Cong and Z. Qiu and S. Zhao and H. Zhu and Alexander Revzin and T. Pan",
year = "2008",
month = jan
day = "1",
language = "English (US)",
series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",
publisher = "Transducer Research Foundation",
pages = "236--239",
editor = "Leland Spangler and Turner, {Kimberly L.}",
booktitle = "2008 Solid-State Sensors, Actuators, and Microsystems Workshop",
note = "2008 Solid-State Sensors, Actuators, and Microsystems Workshop ; Conference date: 01-06-2008 Through 05-06-2008",
}