Abstract
With the major advances in soft lithography and polymeric materials, use of microfluidic lab-on-a-chip device has attracted tremendous attention recently. A simple and fast micromachining process is highly in demand to prototype such a device. In this paper, we first reported an out-of-cleanroom printing-based integrated microfabrication process, referred to as printing microelectromechanical system (Printing MEMS). Using the Printing MEMS process, we demonstrated the potential to accomplish an entire design-to-fabrication cycle within an hour, including 50 μm-resolution non-lithographic patterning, well-controlled polyimide etching, three-dimensional pattern alignment and multilayer wax fusion bonding. A microfluidic mixer was prepared by this method and tested for the process validation.
| Original language | English (US) |
|---|---|
| Title of host publication | 2008 Solid-State Sensors, Actuators, and Microsystems Workshop |
| Editors | Leland Spangler, Kimberly L. Turner |
| Publisher | Transducer Research Foundation |
| Pages | 236-239 |
| Number of pages | 4 |
| ISBN (Electronic) | 0964002477, 9780964002470 |
| State | Published - Jan 1 2008 |
| Externally published | Yes |
| Event | 2008 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States Duration: Jun 1 2008 → Jun 5 2008 |
Publication series
| Name | Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop |
|---|
Conference
| Conference | 2008 Solid-State Sensors, Actuators, and Microsystems Workshop |
|---|---|
| Country | United States |
| City | Hilton Head Island |
| Period | 6/1/08 → 6/5/08 |
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ASJC Scopus subject areas
- Control and Systems Engineering
- Electrical and Electronic Engineering
- Hardware and Architecture
Cite this
Printing mems : From a single flexible polyimide film to three-dimensional integrated microfluidics. / Wang, W.; Cong, H.; Qiu, Z.; Zhao, S.; Zhu, H.; Revzin, Alexander; Pan, T.
2008 Solid-State Sensors, Actuators, and Microsystems Workshop. ed. / Leland Spangler; Kimberly L. Turner. Transducer Research Foundation, 2008. p. 236-239 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Printing mems
T2 - From a single flexible polyimide film to three-dimensional integrated microfluidics
AU - Wang, W.
AU - Cong, H.
AU - Qiu, Z.
AU - Zhao, S.
AU - Zhu, H.
AU - Revzin, Alexander
AU - Pan, T.
PY - 2008/1/1
Y1 - 2008/1/1
N2 - With the major advances in soft lithography and polymeric materials, use of microfluidic lab-on-a-chip device has attracted tremendous attention recently. A simple and fast micromachining process is highly in demand to prototype such a device. In this paper, we first reported an out-of-cleanroom printing-based integrated microfabrication process, referred to as printing microelectromechanical system (Printing MEMS). Using the Printing MEMS process, we demonstrated the potential to accomplish an entire design-to-fabrication cycle within an hour, including 50 μm-resolution non-lithographic patterning, well-controlled polyimide etching, three-dimensional pattern alignment and multilayer wax fusion bonding. A microfluidic mixer was prepared by this method and tested for the process validation.
AB - With the major advances in soft lithography and polymeric materials, use of microfluidic lab-on-a-chip device has attracted tremendous attention recently. A simple and fast micromachining process is highly in demand to prototype such a device. In this paper, we first reported an out-of-cleanroom printing-based integrated microfabrication process, referred to as printing microelectromechanical system (Printing MEMS). Using the Printing MEMS process, we demonstrated the potential to accomplish an entire design-to-fabrication cycle within an hour, including 50 μm-resolution non-lithographic patterning, well-controlled polyimide etching, three-dimensional pattern alignment and multilayer wax fusion bonding. A microfluidic mixer was prepared by this method and tested for the process validation.
UR - http://www.scopus.com/inward/record.url?scp=85061907211&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85061907211&partnerID=8YFLogxK
M3 - Conference contribution
T3 - Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop
SP - 236
EP - 239
BT - 2008 Solid-State Sensors, Actuators, and Microsystems Workshop
A2 - Spangler, Leland
A2 - Turner, Kimberly L.
PB - Transducer Research Foundation
ER -