Network analyzer measurement De-embedding utilizing a distributed transmission matrix bisection of a single THRU structure

We present a novel de-embedding method applicable to high frequency network analyzer measurements involving bisection of a THRU structure. Although similar methods have been published prior to this paper, to our knowledge this new method is unique in that one single de-embedding structure is required (a symmetric THRU), no other simplifying assumptions regarding the THRU structure are required, and no lumped element approximations are required. We present on-wafer measurements of single transistors and transmission line structures in several integrated circuit technologies comparing results using this de-embedding technique to other more commonly used de-embedding techniques (Y, Z subtraction) as well as to on-wafer calibration techniques. Most measurements are to 110 GHz, with select measurements to 220 GHz illustrating the utility of the method well beyond frequencies at which lumped element approximations break down.