Laser direct-write and its application in low temperature Co-fired ceramic (LTCC) technology

Chengping Zhang, David Liu, Scott A. Mathews, John Graves, Timothy M. Schaefer, Barry K. Gilbert, Rohit Modi, Huey Daw Wu, Douglas B. Chrisey

Research output: Contribution to journalArticle

31 Scopus citations

Abstract

Seeking better efficiency and faster turn-around in microelectronics manufacturing, a maskless laser direct-write process has been developed and applied to fabricate practical devices. The process uses a short pulse UV laser to transfer material from a source layer, or "ribbon", to a substrate. Patterning is achieved by scanning the laser beam, translating the receiving substrate, or both. No wet chemistry is required. This technique has a minimum resolution of 10 μm. Using low temperature Co-fired ceramic materials and the laser direct-write process, a multi-layer laminated band pass filter was fabricated. The inductors, resistors, and capacitors were fabricated on separate layers. The connections between the layers were made through interlayer vias. Test results show fully functional band pass filters with center frequency around 1.15 GHz. Simulation results are also discussed.

Original languageEnglish (US)
Pages (from-to)41-49
Number of pages9
JournalMicroelectronic Engineering
Volume70
Issue number1
DOIs
StatePublished - Oct 1 2003

Keywords

  • Band pass filter
  • Laser direct-write
  • Low temperature Co-fired ceramic (LTCC)
  • Multilayer

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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    Zhang, C., Liu, D., Mathews, S. A., Graves, J., Schaefer, T. M., Gilbert, B. K., Modi, R., Wu, H. D., & Chrisey, D. B. (2003). Laser direct-write and its application in low temperature Co-fired ceramic (LTCC) technology. Microelectronic Engineering, 70(1), 41-49. https://doi.org/10.1016/S0167-9317(03)00389-7