TY - JOUR
T1 - Laser direct-write and its application in low temperature Co-fired ceramic (LTCC) technology
AU - Zhang, Chengping
AU - Liu, David
AU - Mathews, Scott A.
AU - Graves, John
AU - Schaefer, Timothy M.
AU - Gilbert, Barry K.
AU - Modi, Rohit
AU - Wu, Huey Daw
AU - Chrisey, Douglas B.
N1 - Funding Information:
This work has been supported by the Defense Advanced Research Projects Agency (DARPA), Defense Sciences Office, under the Mesoscale Integrated Conformal Electronics (MICE) initiative, Dr. Valerie Browning, Program Manager. The authors would like to acknowledge the contributions to this work of Dr. Michael T. Duignan, who died in a car accident, October 27, 2002. Dr. Duignan was the principal investigator of this project and he will be greatly missed.
Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2003/10
Y1 - 2003/10
N2 - Seeking better efficiency and faster turn-around in microelectronics manufacturing, a maskless laser direct-write process has been developed and applied to fabricate practical devices. The process uses a short pulse UV laser to transfer material from a source layer, or "ribbon", to a substrate. Patterning is achieved by scanning the laser beam, translating the receiving substrate, or both. No wet chemistry is required. This technique has a minimum resolution of 10 μm. Using low temperature Co-fired ceramic materials and the laser direct-write process, a multi-layer laminated band pass filter was fabricated. The inductors, resistors, and capacitors were fabricated on separate layers. The connections between the layers were made through interlayer vias. Test results show fully functional band pass filters with center frequency around 1.15 GHz. Simulation results are also discussed.
AB - Seeking better efficiency and faster turn-around in microelectronics manufacturing, a maskless laser direct-write process has been developed and applied to fabricate practical devices. The process uses a short pulse UV laser to transfer material from a source layer, or "ribbon", to a substrate. Patterning is achieved by scanning the laser beam, translating the receiving substrate, or both. No wet chemistry is required. This technique has a minimum resolution of 10 μm. Using low temperature Co-fired ceramic materials and the laser direct-write process, a multi-layer laminated band pass filter was fabricated. The inductors, resistors, and capacitors were fabricated on separate layers. The connections between the layers were made through interlayer vias. Test results show fully functional band pass filters with center frequency around 1.15 GHz. Simulation results are also discussed.
KW - Band pass filter
KW - Laser direct-write
KW - Low temperature Co-fired ceramic (LTCC)
KW - Multilayer
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U2 - 10.1016/S0167-9317(03)00389-7
DO - 10.1016/S0167-9317(03)00389-7
M3 - Article
AN - SCOPUS:0141754205
SN - 0167-9317
VL - 70
SP - 41
EP - 49
JO - Microelectronic Engineering
JF - Microelectronic Engineering
IS - 1
ER -