Original language | English (US) |
---|---|
Pages (from-to) | 235-248 |
Number of pages | 14 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 1390 |
DOIs | |
State | Published - Apr 1 1991 |
Event | Microelectronic Interconnects and Packages: System and Process Integration 1990 - Boston, United States Duration: Nov 4 1990 → Nov 9 1990 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering